Batch Into Step
The "Batch Into Step" function is a custom PROMIS™ function that you add to your existing menu.
It gives you the ability to track-in multiple lots at the same time to an equipment, checking each lot against recipe parameters and load size constraints.
Enter first lot id to batch, or NONE, RETURN, END:
Lots waiting for equipment type NOVELLUS:
P25863.1 (50611.01) P29393.1 (50611.02) P30722.1 (50611.02)
P30749.1 (50612.01) P30751.1 (50612.02) P31291.1 (50612.02)
No lots are running in equipment type APEX_TUBE1
Enter first lot id to batch, or NONE, RETURN, END: p30749.1
The first batch lot P30749.1 uses recipe 50336.02
Recipe maximum equipment capacity is 50 wafers
Lot P30749.1 (24 wafers). Batch load size is now 24 wafers
Remaining equipment capacity is now 26 wafers
Enter next lot id in batch, or NONE, RETURN, END: p30751.1
Lot P30751.1 (22 wafers). Batch load size is now 46 wafers
Remaining equipment capacity is now 2 wafers
Enter next lot id in batch, or NONE, RETURN, END: end
You have selected the following lots for batch track-in:
P30749.1 ( 24 wafers) P30751.1 ( 22 wafers)
Proceed with batch track-in?: y
The "Batch Into Step" function integrates with AutoMan to give you full automation control of the track-in process.
Once the 'S' button is pressed, each lot is tracked in automatically and automation is started.