Semiconductor Factory Automation Solutions

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Products

  • HyperScript
  • XML, HTML, CGI
  • SOAP
  • SQL
  • SECS/GEM
  • PROMIS™ HS
  • TLOG Feed
  • AutoMan
  • Batch Track In
  • Equipment View
  • HTML to XHTML

SECS/GEM with HyperScript

With HyperScript's SECS/GEM capabilities, you can create just about any type of SECS/GEM interface imaginable, from equipment side simulators to host-side clients. To show you just how easy it is to create and manage SECS automation interfaces with HyperScript, an interactive pop-up window is provided for you to interact with.

If a pop-up window did not appear, then start a e-SECS session by clicking here.
Not running? Press here to check and restart the service.

On this web-server, the following HyperScript services are currently running:

  • Apex (Furnace tubes k1 to k4)
  • Apex Server (multiplexer for SECS messages to/from equipment)
  • Apex Simulator (equipment simulator for SECS messages)

Figure 1: Webserver

You can send and receive SECS messages from any of the components through the web (e-SECS) interface. The e-SECS panel is written entirely in HyperScript, generates HyperScript, and runs HyperScript. There are no hidden layers to find.

Try the following:
  1. Start by selecting the apex interface and pressing [Load]


  2. Next, select which furnace tube you wish to send a SECS message to. Press the [Load] button.


  3. The green window is ready to send a zero-list S1F13 message to the equipment. Press the [Send] button.


  4. The orange screen will show you the response for your message, providing the W-bit is set.


  5. If you want to send more complex messages, for example, a S1F3 with specific equipment constants, then dial up Stream 1, Function 3, and input the S1F3 message to send.



  6. Since this program is in DEMO and SECURE mode, you cannot change anything, however you can browse the files that make up the entire SECS/GEM interfaces for the various components.


  7. As you will see, the SECS/GEM capabilities are easy to manipulate. At our customer sites, this interface is used by equipment and process engineers to create and manage their own automation interfaces. The additional windows used for this purpose are for creating the new interface files and assigning the communication parameters.




Copyright © 2006 Abinition, Inc.