Batch Into Step
Overview
The Batch Into Step menu function can be used in PROMIS to perform batch track-in operations on multiple lots. Working with AutoMan, it interacts with a remote automation program object (created with HyperScript), sending and receiving messages via the root message server. The remote automation object performs the batch track-in task, and communicates back to the AutoMan interface with information indicating success or failure.
Batch Into Step adds to the AutoMan interface additional automation control parameters for batching lots together for track-in. These specify which parameters in the lot recipe are HARD (i.e. must be identical) and which are SOFT (i.e. do not have to be identical).
The Batch Into Step menu function for PROMIS performs batch track-in operations, and works with AutoMan.
Parameters
When batching lots together for track-in, it is generally required that the parameter values for each of the lots be identical, such as the name of the process recipe that is run on the equipment. When parameter values must be identical, they are called HARD parameters. When parameter values do not need to be identical, they are called SOFT parameters.
The batching function provides three types of control parameters that can be used to specify which parameters in the recipe are HARD and which are SOFT.
- $AUTO_SOFTBATCH
- $AUTO_SOFTPARM0 through $AUTO_SOFTPARM9
- $AUTO_HARDPARM0 through $AUTO_HARDPARM9
The rules for using these control parameters is somewhat complex. It is based on the usage of the control parameters and is implemented as the following set of logical transitions:
- All parameters in the recipe are set to HARD by default.
- If $AUTO_INITRECPn parameters exist, then the specified initialization parameters are set to HARD, and all other parameters are set to SOFT.
- If $AUTO_SOFTBATCH is set to YES, then all parameters, including initialization parameters are set to SOFT.
- If $AUTO_HARDBATCHn parameters exist, then the specified parameters are set to HARD.
- If $AUTO_SOFTBATCHn parameters exist, then the specified parameters are set to SOFT.
The Batch Into Step menu function for PROMIS performs batch track-in operations, and works with AutoMan.
FAQ
These are answers to a few Frequently Asked Questions about the Batch Into Step function
- How does the batch function determine maximum batch capacity?
If the PROMIS logical OPTION_EQPAVAILENABLED is YES If the recipe maximum processing capacity (recp.maxProcCap) is defined (and greater than zero) then batch maximum capacity = recp.maxProcCap else if the recipe maximum planning load capacity (recp.maxLoadSize) is greater than zero then batch maximum capacity = recp.maxLoadSize else (the PROMIS logical OPTION_EQPAVAILENABLED is NO) batch capacity is not considered. *** IN MOST CASES, the recp.maxLoadSize is used because the recp.maxProcCap field is not defined.A - How does the batch function get a list of available equipment?
If the recp.maxProcCap was defined then the available list or equipment units will be constrained by the following conditions:- The equipment unit must be currently available.
- If the equipment unit is running lots, then the running lots must be compatible with the lot to be tracked into the equipment:
- the material type must be the same
- the attribute (wafer/lot) must be the same
- the maximum processing capacity (from recp.maxProcCap) be the same.
- The equipment unit must have enough capacity to hold the wafers.
- The lot type must compatible with equipment status. ( i.e.: normal lots for avail, maintenance lots for maintAvail)
If the lot is using planning capacity standards (or none at all), then the equipment units will be constrained by the following conditions:
- The equipment unit must be currently available.
- Lot type must compatible with equipment status. (i.e.: normal lots for avail, maintenance lots for maintAvail)